MANUFACTURING METHOD OF FERROMAGNETIC TUNNEL JUNCTION BODY AND FERROMAGNETIC TUNNEL JUNCTION BODY

摘要

PROBLEM TO BE SOLVED: To provide a ferromagnetic tunnel junction body having a uniform tunnel barrier layer and a manufacturing method thereof.;SOLUTION: A manufacturing method of a ferromagnetic tunnel junction body includes a step of laminating a first ferromagnetic metal layer, a step of laminating a nonmagnetic metal oxide layer on one side of the first ferromagnetic metal layer, and a step of laminating a second ferromagnetic metal layer on the side opposite to the first ferromagnetic metal layer of the nonmagnetic metal oxide layer, and the step of laminating the nonmagnetic metal oxide layer is carried out under an oxygen-containing atmosphere, and a flow rate of oxygen supplied into a laminated space during the step of laminating the nonmagnetic metal oxide layer is lower than a flow rate of rare gas.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT