PHYSICAL MODEL PARAMETER IDENTIFICATION DEVICE, METHOD, AND PROGRAM, AND MANUFACTURING PROCESS CONTROL SYSTEM

摘要

PROBLEM TO BE SOLVED: To enable accurate identification of a predetermined parameter of a physical model describing a behavior of a manufacturing process upon manufacture of a specified target product.SOLUTION: A database 105 saves and accumulates actual manufacturing data linking a manufacturing condition for products manufactured in the past with corresponding actual output values of a manufacturing process 101. Upon receiving the manufacturing condition for the product to be identified, an extraction unit 103 calculates a distance in a manufacturing condition space between the manufacturing condition of the target product and the manufacturing condition in the actual manufacturing data saved in the database 105, and extracts, as similar data, a predetermined number of pieces of the actual manufacturing data in order of proximity to the distance. A parameter identification calculation unit 104 performs parameter identification calculation of a physical model by using the similar data extracted from the database 105 by the extraction unit 103. A value of the predetermined parameter obtained by the parameter identification calculation unit 104 is provided to a setup calculation unit 102.SELECTED DRAWING: Figure 1