METHOD FOR MANUFACTURING HIGH ASPECT RATIO STRUCTURE, METHOD FOR PRODUCING ULTRASONIC PROBE, HIGH ASPECT RATIO STRUCTURE, AND X-RAY IMAGE PICKUP DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a high aspect ratio structure capable of producing a high-aspect-ratio structure having a higher dimensional accuracy, a method for manufacturing an ultrasonic probe, a high-aspect-ratio structure, and an X-ray imaging device using the same.;SOLUTION: The method for manufacturing a high aspect ratio structure according to the present invention includes a hole forming step for forming a plurality of holes PEa extending in a direction crossing a main surface on at least one main surface of a predetermined substrate 13, a region defining step for defining a first region AR1 for forming a recessed portion 134 in a next recessed portion forming step and a second region AR2 for forming no recessed portion 134 on the main surface formed with a plurality of holes Pea, a recessed part forming step for forming a recessed part 134 on a substrate 13 corresponding to the first region AR by dipping in an etching solution, and a partition wall thinning hole forming step in which a plurality of holes PEa are formed so that a partition wall thickness between adjacent holes PEa becomes thinner at the bottom side of the hole PEa than that at the main surface side.;SELECTED DRAWING: Figure 7;COPYRIGHT: (C)2018,JPO&INPIT