GAS SENSOR ARRAY, GAS MEASUREMENT DEVICE, AND GAS MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a small size and high sensitivity gas sensor array.;SOLUTION: A gas sensor array 1 includes: a first gas sensor having a heater 13 which has a first sensor element 10 of a first gas sensitive material disposed in a first flow path 4-1 and a second gas sensor 20 which has a second sensor element 22 of a second gas sensitive material disposed in a second flow path 4-2 connected to the first flow path. The heater heats to generate updraft, and the second gas sensor detects molecules of a gas to be measured, which is separated from the first gas sensor being heated by the heater.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT