PELLICLE GLUING MARK REMOVAL DEVICE AND PELLICLE GLUING MARK REMOVAL METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pellicle gluing mark removal device capable of efficiently removing pellicle gluing mark without adding damage to a pattern surface.SOLUTION: A pellicle gluing mark removal device 10 for removing an organic material existing as a pellicle gluing mark on a surface of a reticle has a head 11 for generating atmospheric pressure plasma and irradiating the organic material existing on a surface of a work W with the generated atmospheric pressure plasma, and a control part 20 for controlling the atmospheric pressure plasma from the head 11 based on an irradiation condition for removing the pellicle gluing mark existing on the surface of the work W from the surface.SELECTED DRAWING: Figure 1