High resolution thermopile infrared sensor array with monolithically integrated signal processor

摘要

The present invention includes a signal processing unit monolithically integrated, a plurality of parallel signal processing channels for signals of a plurality of pixels of one sensor array, and a digital port for serially outputting the signals of these pixels. A high-resolution thermopile infrared sensor array, wherein the sensor array is on one or more sensor chips. The subject is a thermopile with a monolithically integrated signal processing unit and a plurality of signal processing channels in parallel, which has a high integration density with minimal power loss and at the same time a thermal and geometrically high resolution. It is to provide an infrared sensor array. The problem is that each signal processing channel K1... KN has at least one analog / digital converter ADC, and in order to store the signal of the pixel SE, one memory area RAM of one memory, It is solved by being assigned to each signal processing channel K1... KN.