MULTILAYER THIN FILM HAVING PERPENDICULAR MAGNETIC ANISOTROPY

摘要

PROBLEM TO BE SOLVED: To keep perpendicular magnetic anisotropy even after high temperature heat treatment.SOLUTION: A manufacturing method of perpendicular magnetic anisotropy multilayer thin film includes a step of sputtering a CoFeSiB target and a Pd target alternately in a vacuum chamber, and forming a (CoFeSiB/Pd) multilayer thin film on a substrate placed in the vacuum chamber. The number n of laminations of the (CoFeSiB/Pd) multilayer thin film in a magnetic tunnel junction element is 3 or more.SELECTED DRAWING: Figure 1