METHOD FOR PRODUCING SILICA PARTICLE, SILICA PARTICLE, AND CHEMICAL MECHANICAL POLISHING COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a method for producing silica particles that can achieve both dispersion stability and polishing properties, silica particles, and a chemical mechanical polishing composition containing the produced silica particles.;SOLUTION: A method for producing silica particles according to the present invention includes hydrolyzing compound A and compound B. Silica particles according to the present invention contain N atoms and Si atoms, and with the mol of N atoms defined as M_N and the mol of Si atoms defined as M_Si, M_N/M_Si=0.001-0.03.;SELECTED DRAWING: None;COPYRIGHT: (C)2018,JPO&INPIT