Square gate vacuum valve and semiconductor manufacturing device provided with same

摘要

The present invention relates to a square gate vacuum valve and a semiconductor manufacturing device comprising the gate electrode of the gate frame of which the first and second gates are formed on opposite sides of the square gate vacuum valve A first shield unit for selectively opening and closing the first gate through a shield plate for shielding the top and a first opening provided on one side of the lower portion of the gate frame, which is linearly movable or rotated in the gate frame, and selectively opens and closes the first gate AndThe lower portion of the gate frame includes a second valve unit, which is disposed linearly or rotationally within the gate frame through the second opening spaced apart from the first opening and selectively opens and closes the second gate.Diagram