SOFT SHEET MANUFACTURING METHOD AND SOFT SHEET POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a soft sheet manufacturing method and a soft sheet polishing device which can manufacture a soft sheet including a polishing pad with high quality and efficiency by polishing a soft sheet to be polished, with high accuracy.;SOLUTION: A polishing pad polishing device 100 comprises: a soft sheet holding surface plate 20 that holds a polishing pad P onto a polishing side surface of a surface plate main body 22; a polishing roll 40 that relatively moves while rotating with respect to the soft sheet holding surface plate 20; a rotationally driving part that rotationally drives the polishing roll 40; a relatively moving/driving part 13 that relatively moves the soft sheet holding surface plate 20 and the polishing roll 40; and a decompressing pump 60 that decompresses the surface plate main body 22. The surface plate main body 22 is formed of a three-dimensional porus body, where the surface plate main body 22 is decompressed by the decompressing pump 60 so that the polishing pad P is suctioned and held on the polishing side surface.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT