EVALUATION METHOD OF NON-MAGNETIC GARNET SINGLE CRYSTAL SUBSTRATE, PRODUCTION METHOD OF NON-MAGNETIC GARNET SINGLE CRYSTAL SUBSTRATE, AND NON-MAGNETIC GARNET SINGLE CRYSTAL SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an evaluation method of a SGGG single crystal substrate for evaluating simply ease of cracking of the substrate, in a process for producing the substrate.;SOLUTION: An evaluation method (S5) of a non-magnetic garnet single crystal substrate includes: etching the surface of the non-magnetic garnet single crystal C split into a prescribed thickness (S6); measuring a center position P2 of a growth striation by observing the growth striation of the etched substrate SA (S7); and evaluating ease of cracking of the substrate based on a distance between the center position P2 of the growth striation and a center position P1 of the substrate (S8).;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT