MICROSCOPIC RAMAN SPECTROMETER AND RAMAN MICROSPECTROSCOPIC SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a microscopic Raman spectrometer and a Raman microspectroscopic system which can perform position detection of a minute sample equal to or smaller than the wavelength of Raman exciting light and Raman measurement.SOLUTION: A microscopic Raman optical system 100 includes: an oblique irradiation optical system 130 irradiating a minute sample 10 with a laser beam for detecting a position of the minute sample 10 on a principal surface of a semiconductor wafer; and a vertical irradiation optical system irradiating the minute sample 10 with a laser beam for exciting Raman scattered light. The laser beam for detecting a position of the minute sample 10 is emitted to the minute sample 10 from an oblique direction with respect to the principal surface of the semiconductor wafer, and the laser beam for exciting the Raman scattered light is emitted to the minute sample 10 from an orthogonal direction with respect to the principal surface of the semiconductor wafer. The position of the minute sample 10 is recognized by a dark field microscopic image.SELECTED DRAWING: Figure 1