Process for producing octachlorotrisilane and octachlorotrisilane produced by the process

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of octachlorotrisilane and to obtain octachlorotrisilane having a purity of 90 mass% or more by conducting the manufacturing method.SOLUTION: There is provided a manufacturing method including: a high temperature reaction process for reacting a raw material gas containing volatilized tetrachlorosilane and hydrogen at high temperature to obtain a reaction production gas containing trichlorosilane; an octachlorotrisilane production process for bringing the reaction production gas obtained by the high temperature reaction process into contact with a cooling liquid obtained by circulation cooling an aggregation liquid generated by cooling the reaction production gas and quickly cooling them to produce octachlorotrisilane in the aggregate liquid; and a recovery process for recovering the produced octachlorotrisilane.SELECTED DRAWING: Figure 1