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METHOD FOR PRODUCING PURE OCTACHLOROTRISILANE AND DECACHLOROTETRASILANES
METHOD FOR PRODUCING PURE OCTACHLOROTRISILANE AND DECACHLOROTETRASILANES
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机译:制备纯邻三氯硅烷和十邻四甲基硅烷的方法
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摘要
The invention relates to a process for producing trimeric and/or quaternary silicon compounds or trimeric and/or quaternary germanium compounds, where a mixture of silicon compounds or a mixture of germanium compounds is exposed to a nonthermal plasma, and the resulting phase is subjected at least once to a vacuum rectification and filtration.
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