Photoconductive antenna for terahertz wave, method of manufacturing photoconductive antenna and terahertz time domain spectroscopy system

摘要

The present invention relates to a metal metal finger photoconductive antenna for generating and / or detecting terahertz waves having at least one substrate (1) and at least one electrode (2) on the front surface of the substrate (1). The photoconductive antenna is composed of a material that reflects terahertz waves and comprises a layer (4) extending from the front surface of the substrate (1) to a distance shorter than the wavelength of the substrate (1) and a finger shaped structure on the front surface of the substrate (1).The finger structure is 5 nm CR of the finger shaped electrode (2) and a first metallized layer consisting of 150 nm Au, and a 500 nm thick SiO2 layer disposed on the first metallized layer, which is spaced at a distance. Delta. On the front face of the substrate (1) at equal distances 5) and a second metal layer comprising a metal finger (6) covering a gap having a periodicity twice as much as the distance. Delta..