Method for manufacturing a gas detector using a micro-electromechanical system manufacturing process

摘要

To provide a manufacturing method of a gas detector capable of preventing a decrease in mechanical strength in a micro electro mechanical system (MEMS) for detecting plural kinds of gases.SOLUTION: Preparation of microelectromechanical system wafer comprising a plurality of units adjacent to each other, formation of a layer of gas sensing material in a microelectromechanical system wafer, anodic bonding of the structural reinforcing layer 20 to a microelectromechanical system wafer , The formation of the gas detection unit 11 by the installation and cutting of the adhesive tape and the formation of the gas detector by adhesion of the gas detection unit to the substrate using the adhesive tape is used. By installing the structural reinforcing layer, it is possible to increase the strength of the part, avoid the problem of cutting the edge part, increase the yield and reduce the cost.(Fig.