Melt gap measurement apparatus, crystal growth apparatus, and melt gap measurement method

摘要

A melt gap measuring apparatus is adapted to measure the gap between the bottom of the heat insulating cover and the surface of the raw material melt inside a crucible. The melt gap measuring apparatus includes a first light-guiding probe having a first upper side and a first bottom side which are opposite to each other. The first upper side is exposed to an inner wall of the heat insulating cover, and the first bottom side protrudes from the bottom side of the heat insulating cover. An image capturing device is disposed above the heat insulating cover to capture the image of the first upper side. Moreover, a crystal growth apparatus and a method of measuring the melt gap are also provided.