Defect diagnosis method and defect diagnosis system

摘要

An error diagnosis method includes: the parameter value obtaining step S1 of obtaining multiple parameter values; the error detection step S2 of calculating a Mahalanobis distance from a unit space based on the obtained parameter values and diagnosing whether or not error is caused at the real machine 5 based on the calculated Mahalanobis distance; the error portion estimation step S3 of estimating an error portion of the real machine 5 based on the Mahalanobis distance; and the matching determination step S5 of structuring an error analyzing model M for analyzing the real machine 5 based on the error portion of the real machine 5 and determining whether or not an output analytical signal Sv of the real machine 5 obtained by analysis of the error analyzing model M and the output signal So output from the real machine 5 match with each other.