Calibration device for microwave analysis equipment or microwave measurement equipment

摘要

The present invention relates to a calibration apparatus 100 for the calibration of analytical or measuring instruments such as vector network analyzers. The calibration apparatus includes a plurality of calibrator connector elements 20A, 20B that allow the instrument to be connected and a plate element 10 that includes a plurality of calibration waveguide structures 111-115 and a conductive surface 12, each calibrator connector element. And / or the conductive surface of the plate element has a periodic structure 27 between which the gap 29 is formed to form a waveguide line interface and to be coupled to the waveguide of the device Each calibrator connector element 20A, 20B, including a waveguide 23 connected to 33, can be interconnected with a calibration waveguide structure (111-115. The calibration device comprises a plate element and / or each calibrator. Control functions 14 and drives that controllably move the connector elements and allow connection of each calibrator connector element 20A, 20B to a different calibration waveguide structure 111-115 Further comprising a stage 13. INVENTION 1.