FLUID CONTROL MECHANISM, FLUID CONTROL MECHANISM ASSEMBLY SET AND FLUID MIXING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a fluid control mechanism having less contamination between plural kinds of fluid in switching flow passages of the plural kinds of fluid, and having fluid useful for downsizing a device.;SOLUTION: A fluid control mechanism includes: an outer part 15 having a plurality of port holes 17 connected to an inlet/outlet port 16 into/from which fluid inflows/outflows; and a sheet-like member 25 overlapped on a surface 151b of the outer part 15, and having at least two flow passages for fluid communicating with at least two of the plurality of port holes 17. The outer part 15 and the sheet-like member 25 are configured to relatively move so that a surface 251a of the sheet-like member 25 overlapped on the surface 151b of the outer part 15 slides with the surface 151b of the outer part 15, thereby switching a flow passage for fluid.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2018,JPO&INPIT