The invention relates to a method of ptychographic imaging. A problem when performing ptychography occurs when the number of pixels is too low. Typically a high number of pixels (after binning) is needed to obtain a high quality reconstruction of an object. Inventors found that, by using calculation planes with more nodes (for example 512 x 512 nodes) than the number of pixels of the detector, a high quality reconstruction of an object can be made, even when using for example a 16 segment detector, or a 32 x 32 pixel detector. Due to the larger pixel size, thus intercepting a higher flux, the demand on detector S/N ratio, and dynamic range, are reduced. The figures show a (simulated) amorphous carbon object and a reconstructed object, using a (simulated) 16 segment detector. Although the reconstructed object shows less resolution ("sharpness"), all features are there. When trying to make a reconstruction with prior art methods, of the same object and using the same probe, reconstruction breaks down (fails) dramatically when using a 128 x 128 pixel detector, and artifacts are observed when using a 256x 256 pixel detector.
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机译：笔迹成像的方法技术领域本发明涉及一种笔迹成像的方法。当像素数太低时，在执行笔录法时会出现问题。通常，需要大量像素（合并后）才能获得对象的高质量重建。发明人发现，通过使用具有比检测器的像素数更多的节点（例如512 x 512个节点）的计算平面，即使使用例如16段检测器，也可以对物体进行高质量的重建，或者一个32 x 32像素的检测器。由于较大的像素尺寸，因此拦截了较高的通量，因此降低了对检测器信噪比和动态范围的要求。这些图显示了（模拟的）无定形碳物体和使用（模拟的）16段检测器重建的物体。尽管重建的对象显示出较低的分辨率（“清晰度”），但所有特征均存在。当试图用现有技术的方法对同一物体和使用相同的探针进行重建时，在使用128×128像素检测器时，重建会严重崩溃（失败），并且在使用256×256像素检测器时会观察到伪像。
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