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Matrix sensor with logarithmic response and wide temperature operating range
Matrix sensor with logarithmic response and wide temperature operating range
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机译:具有对数响应和宽温度工作范围的矩阵传感器
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摘要
To provide an optical sensor utilizing complementary metal oxide semiconductor (CMOS) integration technology.Kind Code: A1 A matrix array sensor having a logarithmic response and a wide range of temperature operating ranges is provided, the sensor comprising a plurality of active pixels each defined by a photodiode (PD) operating in a solar cell mode, The diode is formed by a semiconductor junction in the substrate (11) and the reverse bias junction (20) is present at a distance (d) from the junction of the photodiode that is shorter than the diffusion distance of charge carriers in the substrate , The junction is formed by diffusion to a depth (p) that is greater than the depth (p ') used to form the source or drain of the transistor of the sensor adjacent to the photodiode.(FIG.
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