Method for optimizing parameters of ion optics to improve signal stability against fluctuation of ion beam extraction process from plasma

摘要

PROBLEM TO BE SOLVED: To improve signal stability by reducing amount of signal drift relating to an induction coupling plasma mass spectrometer.SOLUTION: Relating to an induction coupling plasma mass spectrometer, a method is disclosed for improving stability of a detection signal from ion detection means. The method includes in which, 1) a pseudo sample containing at least one kind of element is prepared, 2) the pseudo sample ia introduced into the induction coupling plasma mass spectrometer, and by changing a voltage applied to an ion optical system as time passes, measures the pseudo sample, 3) for the element, the amount of change in detection signal that changes between detections is obtained, 4) based on the obtained change amount, a voltage at which the detection signal is most stable is selected, and is used for analysing the sample.