Evaluation method of scanning electron microscope apparatus and evaluation apparatus of scanning electron microscope apparatus

摘要

PROBLEM TO BE SOLVED: To provide an evaluation method and an evaluation device of a scanning electron microscope apparatus which allows for highly accurate quantization of the state of a scanning electron microscope apparatus, from the observation image of a metal particle.SOLUTION: An evaluation method for evaluating the state of a scanning electron microscope apparatus from the image of a metal particle acquired by the scanning electron microscope apparatus includes a noise removal step for removing the noise of image information of a metal particle, an image quality quantization step for obtaining an image quality evaluation value by quantizing the image quality of the image of a metal particle, based on the image information from which noise is removed in the noise removal step, a determination step for determining the quality of state of the scanning electron microscope apparatus based on the image quality evaluation value, and a display step for displaying the determination results of the determination step.