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Monolithic 3-axis magnetic field sensor

机译:单片式三轴磁场传感器

摘要

A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a predetermined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.
机译:提供了三轴磁传感器或磁力计。在形成于基板上的凸块结构的相对侧上制造两个使用理发店磁极AMR结构的磁传感器惠斯通电桥,以提供相对于基板的平坦表面成预定角度的表面。桥组件沿Y轴定向,并且桥相互连接,使得可以通过处理桥信号来产生Y和Z通道信号。 X通道信号由设置在基板的水平面上的X轴传感器提供。

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