Optical filter, optical filter module, analytical instrument and optical equipment

摘要

PROBLEM TO BE SOLVED: To provide an optical filter and an optical filter module in which a gap amount can be obtained with high accuracy, and an analytical instrument and an optical apparatus.SOLUTION: An optical filter 10 includes a first substrate 20, a second substrate 30, a first reflection film 40 disposed on the first substrate 20, a second reflection film 50 disposed on the second substrate, first and second fixed electrodes 62, 64 disposed on the first substrate 20 at positions in a periphery of the first reflection film in a plan view, and first and second movable electrodes 72, 74 disposed on the second substrate to oppose to the first and second fixed electrodes, respectively. The first and second movable electrodes are formed in a centrosymmetric structure centering on the reflection film; and a slit is formed in the second movable electrode.SELECTED DRAWING: Figure 1