首页>
外国专利>
BASE INCLUDING AlON COATING HAVING ANY YTTRIA COATING LAYER
BASE INCLUDING AlON COATING HAVING ANY YTTRIA COATING LAYER
展开▼
机译:包含任何YTTRIA涂层的Alon涂层的基础
展开▼
页面导航
摘要
著录项
相似文献
摘要
A fluorine plasma resistant coating on a substrate being a component in a semiconductor manufacturing system is disclosed. In one embodiment the composition includes an AlON coating that overlies a substrate, and an optional yttria coating layer that overlies the AlON coating, with a total coating thickness of about 5-6 microns.
展开▼