Optical phase modulation element, element setting method, optical functional circuit, and optical matrix circuit

摘要

An optical functional device equivalent to a 2×2 Mach-Zehnder optical switch is produced by forming two 3 dB couplers and input/output waveguides on a substrate. Two optical phase modulation paths are formed on corresponding waveguides between 3 dB couplers. A channel region having an opposite electric polarity is formed between source and drain regions, having the predetermined electric polarity, formed on the substrate. The optical phase modulation path is insulated from the surrounding area and disposed above the channel region. Additionally, a control electrode (i.e. a gate region) subjected to high-density doping is formed above the optical phase modulation path. By applying an electric voltage having the predetermined polarity to the control electrode, the source region, and the drain region, it is possible to generate hot carriers, in proximity to the optical phase modulation path, so as to accumulate charges and change a refractive index, thus setting a desired light-wave input/output path.