Automatic processing apparatus, automatic processing method, and pallet

摘要

The automatic processing device is provided with: multiple processing units for performing specified processes on an optical device having an aperture through which light beams enter; a mounting platform on which the optical device is mounted as a unit with a pallet on which the optical device is fixed; and an arm robot for raising the optical device as a unit with the pallet from the mounting platform, sequentially attaching the optical device as a unit with the pallet on the multiple processing units, and returning the optical device, after completion of the specified processes, as a unit with the pallet to the mounting platform.