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Shape measuring apparatus, attitude control apparatus, structure manufacturing system, and shape measuring method

机译:形状测量装置,姿态控制装置,结构制造系统和形状测量方法

摘要

PROBLEM TO BE SOLVED: To provide a shape measurement device, an attitude control device, a structure manufacturing system, and a shape measurement method which reduce measurement errors attributed to the shape of the surface of an object to be measured, and accurately measure the shape of the object.SOLUTION: A shape measurement device includes: an illumination part 11 for radiating by an illumination optical system 112 a plurality of light rays at different positions on a surface 21 of an object 20 to be measured; an imaging part 12 for taking images of the object 20 to be measured having the plurality of light rays radiated thereon by an imaging optical system 122 disposed in the direction different from the radiation direction; a control part for transmitting a control signal for controlling the relative direction of the object 20 to be measured with respect to the illumination part 11 or the imaging part 12 on the basis of the position of an image taken by the imaging part 12 with respect to each of the plurality of light lays; and a shape calculation part for calculating the shape of the surface 21 of the object to be measured having at least one of the plurality of light rays radiated thereon.
机译:解决的问题:提供一种形状测量装置,姿势控制装置,结构制造系统和形状测量方法,其减少归因于被测量物体的表面形状的测量误差,并准确地测量形状解决方案:一种形状测量装置,包括:照明部分11,用于通过照明光学系统112在要测量的物体20的表面21的不同位置上辐射多条光线;成像部件12,用于拍摄由被布置在与辐射方向不同的方向上的成像光学系统122在其上辐射的多条光线的被测量物体20的图像;控制部,其基于由摄像部12拍摄的图像相对于照明部11或摄像部12的位置,发送用于控制被测定物20相对于照明部11或摄像部12的相对方向的控制信号。多个照明灯的每一个;形状计算部,其用于计算被照射物的表面21的形状,该被测量物的表面21放射有多个光线中的至少一种。

著录项

  • 公开/公告号JP6252178B2

    专利类型

  • 公开/公告日2017-12-27

    原文格式PDF

  • 申请/专利权人 株式会社ニコン;

    申请/专利号JP20140001296

  • 发明设计人 山口 雅哉;

    申请日2014-01-08

  • 分类号G01B11/24;

  • 国家 JP

  • 入库时间 2022-08-21 13:07:14

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