Semiconductor test fixture, test method

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor testing tool and test method capable of preventing current from converging to a specific part of a vertical semiconductor chip.SOLUTION: The semiconductor testing tool includes: a base plate that has a recess and is made of a conductive material; an insulation component that is disposed in the recess and is made of an insulator; and a frame body that includes a plurality of insulator-made frames arranged in a lattice shape and is fixed to the base plate so as to divide the base plate into a plurality of chip installation parts. Each of the plurality of chip installation parts includes a conductive part from which the base plate is exposed in the plane view, and an insulation part from which the insulation component is exposed. A through hole for exposing the base plate is formed in a part of the frame body that is in contact with the insulation part in the plane view.