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Crystal alignment layer stacked structure, electronic memory, and method of manufacturing crystal alignment layer stacked structure

机译:晶体取向层堆叠结构,电子存储器以及制造晶体取向层堆叠结构的方法

摘要

A crystal orientation layer laminated structure capable of widely selecting materials for a base substrate and an electrode substrate, an electronic memory using the crystal orientation layer laminated structure and a method for manufacturing the crystal orientation layer laminated structure are provided. The crystal orientation layer laminated structure according to the present invention has such a feature as including a substrate, including an orientation control layer which is laminated on the substrate, which is made of any of germanium, silicon, tungsten, germanium-silicon, germanium-tungsten and silicon-tungsten, and whose thickness is at least 1 nm or more, and including a first crystal orientation layer which is laminated on the orientation control layer, which is made of any of SbTe, Sb 2 Te 3 , BiTe, Bi 2 Te 3 , BiSe and Bi 2 Se 3 as a main component, and which is oriented in a certain crystal orientation
机译:提供一种能够广泛选择基础基板和电极基板的材料的晶体取向层层叠结构,使用该晶体取向层层叠结构的电子存储器以及该晶体取向层层叠结构的制造方法。根据本发明的晶体取向层层叠结构具有包括衬底的特征,该衬底包括层叠在衬底上的取向控制层,该取向控制层由锗,硅,钨,锗-硅,锗-中的任何一种制成。钨和硅钨,其厚度至少为1 nm或更大,并且包括层叠在取向控制层上的第一晶体取向层,该取向取向层由SbTe,Sb 2 Te 3,BiTe,Bi 2中的任何一种制成以Te 3,BiSe和Bi 2 Se 3为主要成分,并以一定的晶体取向取向

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