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Method and system for tool condition monitoring based on a simulated inline measurement
Method and system for tool condition monitoring based on a simulated inline measurement
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机译:基于模拟在线测量的刀具状态监测方法和系统
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摘要
A method and system for removing control action effects from inline measurement data for tool condition monitoring is disclosed. An exemplary method includes determining a control action effect that contributes to an inline measurement, wherein the inline measurement indicates a wafer characteristic of a wafer processed by a process tool; and evaluating the inline measurement without the control action effect contribution to determine a condition of the process tool.
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