首页>
外国专利>
Remote plasma and electron beam generation system for a plasma reactor
Remote plasma and electron beam generation system for a plasma reactor
展开▼
机译:用于等离子体反应器的远程等离子体和电子束产生系统
展开▼
页面导航
摘要
著录项
相似文献
摘要
Embodiments of an apparatus having an improved coil antenna assembly with a remote plasma source and an electron beam generation system that can provide enhanced plasma in a processing chamber. In one embodiment, a plasma processing chamber includes a chamber body, a lid enclosing an interior volume of the chamber body, a substrate support disposed in the interior volume, a dual inductively coupled source including a coil antenna assembly coupled to the chamber body through the lid, and a remote plasma source coupled to the chamber body through the lid.
展开▼