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OPTICAL MEASUREMENT ELEMENT FOR ALIGNMENT IN WAFER-LEVEL TESTING AND METHOD FOR ALIGNING AN OPTICAL PROBE USING THE SAME
OPTICAL MEASUREMENT ELEMENT FOR ALIGNMENT IN WAFER-LEVEL TESTING AND METHOD FOR ALIGNING AN OPTICAL PROBE USING THE SAME
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机译:晶圆级测试中用于校准的光学测量元件以及使用该方法测量光学探针的方法
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摘要
An alignment optical measurement element includes a grating coupler, and a reflector coupled to the grating coupler. The alignment optical measurement element is arranged so that: the grating coupler diffracts an incident light in a first direction into a first diffracted light to propagate the first diffracted light as a first propagating light in a second direction, the reflector reflects the first propagating light into a second propagating light in a third direction opposite to the second direction; and the grating coupler diffracts the second propagating light into a second diffracted light to emit the second diffracted light as an emitted light in a fourth direction opposite to the first direction.
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