SENSOR FOR DETECTING ELECTRICALLY CONDUCTIVE AND/OR POLARIZABLE PARTICLES, SENSOR SYSTEM, METHOD FOR OPERATING A SENSOR, METHOD FOR PRODUCING A SENSOR OF THIS TYPE AND USE OF A SENSOR OF THIS TYPE

摘要

A sensor for detecting electrically conductive and/or polarizable particles, in particular for detecting soot particles, includes a substrate and at least two electrode layers, a first electrode layer and at least one second electrode layer. Which is arranged between the substrate and the first electrode layer. At least one insulation layer is formed between the first electrode layer and the at least one second electrode layer and at least one opening is formed in both the first electrode layer and the at least one insulation layer. At least some sections of the opening in the first electrode layer and of the opening in the insulation layer are arranged one above the other, such that at least one passage is formed to the second electrode layer.