STRESS COMPENSATED OSCILLATOR CIRCUITRY AND INTEGRATED CIRCUIT USING THE SAME

摘要

A stress compensated oscillator circuitry comprises a sensor arrangement for providing a sensor output signal S_Sensor, wherein the sensor output signal S_Sensor is based on an instantaneous stress or strain component a in the semiconductor substrate, a processing arrangement for processing the sensor output signal S_Sensor and providing a control signal S_Control depending on the instantaneous stress or strain component σ in the semiconductor substrate, and an oscillator arrangement for providing an oscillator output signal S_osc having an oscillator frequency f_osc based on the control signal S_Control, wherein the control signal S_Control controls the oscillator output signal S_osc, and wherein the control signal S_Control reduces the influence of the instantaneous stress or strain component σ in the semiconductor substrate onto the oscillator output signal S_osc, so that the oscillator circuitry provides a stress compensated oscillator output signal.