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MICRO-ELECTRO-MECHANICAL-SYSTEMS BASED ACOUSTIC EMISSION SENSORS
MICRO-ELECTRO-MECHANICAL-SYSTEMS BASED ACOUSTIC EMISSION SENSORS
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机译:基于微机电系统的声发射传感器
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摘要
Acoustic emission (AE) microelectromechanical system (MEMS) transducers of the present disclosure utilize a spring-mass system and a capacitance-change transduction principle. The transducers include a dielectric layer between a fixed electrode and a moveable metal layer to reduce the stiction failure. The moveable metal layer may displace in a particular direction when interacting with elastic waves. Additionally, the moveable metal layer may be formed using an electroplating technique. In some embodiments, multiple spring-mass unit cells may be combined in parallel to increase the sensitivity of the transducer.
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