ALUMINUM NITRIDE PROTECTION OF SILVER APPARATUS, SYSTEM AND METHOD

摘要

A semiconductor apparatus including a wafer base with a top side and a bottom side, a silver base with a top side and a bottom side, wherein the bottom side of the silver base is attached to the top side of the wafer base and wherein the silver base provides a reflective surface, and an aluminum nitride protective layer attached to the top side of the silver base, wherein the aluminum nitride protective layer shields the silver base from the environment.