首页>
外国专利>
Automated Accuracy-Oriented Model Optimization System for Critical Dimension Metrology
Automated Accuracy-Oriented Model Optimization System for Critical Dimension Metrology
展开▼
机译:关键尺寸计量学的面向精度的自动化模型优化系统
展开▼
页面导航
摘要
著录项
相似文献
摘要
Techniques and systems for critical dimension metrology are disclosed. Critical parameters can be constrained with at least one floating parameter and one or more weight coefficients. A neural network is trained to use a model that includes a Jacobian matrix. During training, at least one of the weight coefficients is adjusted, a regression is performed on reference spectra, and a root-mean-square error between the critical parameters and the reference spectra is determined. The training may be repeated until the root-mean-square error is less than a convergence threshold.
展开▼