首页> 外国专利> TRACE/VIA HYBRID STRUCTURE WITH THERMALLY AND ELECTRICALLY CONDUCTIVE SUPPORT MATERIAL FOR INCREASED THERMAL AND ELECTRICAL PERFORMANCE

TRACE/VIA HYBRID STRUCTURE WITH THERMALLY AND ELECTRICALLY CONDUCTIVE SUPPORT MATERIAL FOR INCREASED THERMAL AND ELECTRICAL PERFORMANCE

机译:具有导热和导电性能的材料的TRACE / VIA混合结构,可提高热性能和电性能

摘要

A method of forming an interconnect that includes providing a sacrificial trace structure using an additive forming method and forming a continuous seed metal layer on the sacrificial trace structure. The sacrificial trace structure is removed, and the continuous seed metal layer remains. An interconnect metal layer is formed on the continuous seed layer, and an electrically insulating material layer is formed on the interconnect metal layer. An electrically conductive support material is formed to encapsulate a majority of the interconnect metal layer, wherein the ends of the interconnect metal layer are exposed through opposing surfaces of the electrically conductive support material to provide an interconnect extending through the electrically conductive support material.
机译:一种形成互连的方法,该方法包括使用添加形成方法提供牺牲迹线结构并在牺牲迹线结构上形成连续的籽晶金属层。牺牲痕迹结构被去除,并且连续的种子金属层保留。在连续种子层上形成互连金属层,并且在互连金属层上形成电绝缘材料层。形成导电支撑材料以封装大部分互连金属层,其中互连金属层的端部通过导电支撑材料的相对表面暴露,以提供延伸穿过导电支撑材料的互连。

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