NON-VOLATILE RESISTIVE RANDOM-ACCESS MEMORY DEVICE WITH RELIABLE OPERATION INDICATOR, DEVICE-TO-DEVICE UNIFORMITY, AND MULTILEVEL CELL STORAGE, AND METHOD OF MANUFACTURING THE SAME

摘要

Disclosed is a multilevel nonvolatile resistive random-access memory device including a lower electrode, an upper electrode, and an insulation film interposed between the lower electrode and the upper electrode. Each of the lower electrode and the upper electrode includes a plate-shaped portion, and a patterned portion formed on the plate-shaped portion, and the patterned portion includes a protruding 3-dimensional prism structure pattern in which a plurality of prism-shaped structures is repeatedly arranged at a constant interval in a given direction. The patterned portion of the lower electrode and the patterned portion of the upper electrode are arranged to face each other, and a longitudinal direction of the prism-shaped structures of the lower electrode patterned portion and a longitudinal direction of the prism-shaped structures of the upper electrode patterned portion cross each other.