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THIN FILM TOTAL INTERNAL REFLECTION DIFFRACTION GRATING FOR SINGLE POLARIZATION OR DUAL POLARIZATION
THIN FILM TOTAL INTERNAL REFLECTION DIFFRACTION GRATING FOR SINGLE POLARIZATION OR DUAL POLARIZATION
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机译:薄膜全内反射衍射光栅,用于单极化或双极化
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摘要
A diffraction grating may include a substrate. The diffraction grating may include an etch stop layer to prevent etching of the substrate. The etch stop layer may be deposited on the substrate. The diffraction grating may include a marker layer to indicate an etch end-point associated with etching of a dielectric layer. The marker layer may be deposited on a portion of the etch stop layer. The diffraction grating may include the dielectric layer to form a grating layer after being etched. The dielectric layer may be deposited on at least the marker layer.
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