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Thin film total internal reflection diffraction grating for single polarization or dual polarization
Thin film total internal reflection diffraction grating for single polarization or dual polarization
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机译:用于单偏振或双偏振的薄膜全内反射衍射光栅
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摘要
A diffraction grating may include a substrate. The diffraction grating may include an etch stop layer to prevent etching of the substrate. The etch stop layer may be deposited on the substrate. The diffraction grating may include a marker layer to indicate an etch end-point associated with etching of a dielectric layer. The marker layer may be deposited on a portion of the etch stop layer. The diffraction grating may include the dielectric layer to form a grating layer after being etched. The dielectric layer may be deposited on at least the marker layer.
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