Predictive analysis of complex datasets and systems and methods including the same

摘要

Predictive analysis of complex datasets and systems and methods including the same are disclosed herein. The methods include analyzing airborne particle count data from a cleanroom environment to predict a particle count fault condition within the cleanroom environment. The methods further include generating an airborne particle count data repository that includes particle counts within the cleanroom environment, analyzing the airborne particle count data to calculate a difference between a first rate of change and a second rate of change, and predicting the particle count fault condition responsive to the difference between the first rate of change and the second rate of change being outside a predetermined threshold range difference. The systems include computer readable storage media including computer-executable instructions that, when executed, direct a data analysis system to perform the methods. The systems also include a distributed cleanroom particle count monitoring system including a plurality of detection nodes.