Light penetration depth evaluation method, performance test method using evaluation method, and optical tomography apparatus

摘要

Using an optical tomography method of splitting low coherent light into sample light and reference-light, emitting the sample light to a measurement-target in a line shape, generating interference light by superimposing reflected light from the measurement-target due to emission of the sample light and the reference-light on each other, and acquiring a two-dimensional spectroscopic tomographic-image of the measurement-target by spectroscopically detecting the interference light and performing frequency analysis, an arbitrary wavelength region in an ultraviolet region is cut out from low coherent light including a wavelength region from an ultraviolet region to a visible region and the arbitrary wavelength region is shaped into a spectrum having an arbitrary wavelength width, the two-dimensional spectroscopic tomographic-image is acquired as using the low coherent light, and the penetration depth of the sample light for the measurement-target is evaluated based on the two-dimensional spectroscopic tomographic-image.