Wider dynamic accuracy range for gas delivery devices

摘要

A mass flow meter utilizes both positive and negative slopes of operating curves for first and second thermal sensors for a wider dynamic range. First and second interfaces receive first and second signal readings from first and second thermal sensors. A selection module identifies a zone from the first and second output signals and determines an assigned thermal sensor for the zone from the zone table, regardless of whether the thermal sensor output signals from a positive or negative slope of an operating curve.