SENSOR AND/OR TRANSDUCER DEVICE AND METHOD FOR OPERATING A SENSOR AND/OR TRANSDUCER DEVICE HAVING AT LEAST ONE BENDING STRUCTURE, WHICH INCLUDES AT LEAST ONE PIEZOELECTRIC LAYER

摘要

A sensor and/or transducer device having at least one bending structure including at least one piezoelectric layer in each case, using which an intermediate volume between at least two electrodes of the bending structure is at least partially filled in each case, the sensor and/or transducer device including an electronic unit, which is designed to apply at least one predefined or established actuator voltage between two of the electrodes at a time of the bending structure in such a way that a deformation of the bending structure triggered by an intrinsic stress gradient in the bending structure may be at least partially compensated for. A method for operating a sensor and/or transducer device having at least one bending structure, which includes at least one piezoelectric layer, and a method for calibrating a microphone having at least one bending structure, which includes at least one piezoelectric layer, are also described.