Piezoelectric bending transducer with sensor element for detecting a deflection of the bending transducer, a method for detecting the deflection of the bending element and the use of the detected deflection

摘要

The present invention relates to a piezoelectric bending transducers (1), comprising at least one monolithic piezo element (10, 11) with an electrode layer (101, 111), at least one further electrode layer (102, 103, 112, 113), and a piezo ceramic layer arranged between the electrode layers (104, 105, 114, 115) and at least one sensor element (20) with a sensor electrode (21) for detecting a deflection of the bending transducer. The flexural transducer is characterized in that the sensor electrode of the sensor element has a of the electrode layers of the piezoelectric element. In addition, a method for detecting the deflection of the bending transducer, wherein by means of the deflection of the bending transducer an electrode potential of the sensor electrode of the sensor element is formed, which is tapped off and from which the deflection is determined. Changes of the deflection state, which in the seconds -, minutes - or hours are to take place, can very easily be detected. According to a further aspect of the invention, the detected excursion as an input variable for a control loop for the electrical control of the electrode layers of the bending transducer is used.