Capacitive micromachined ultrasonic transducer with multiple deflectable membranes

摘要

A capacitive micromachined ultrasonic transducer (CMUT) having at least two deflectable membranes. The membranes are spaced from each other, and the membranes contribute to and/or are responsive to receive or transmit an ultrasonic signal. Spacing between the at least two deflectable membranes is adjustable through application of a voltage to cause deflection of at least one of the deflectable membranes, to affect the receive/transmit properties of the CMUT.